WORK TRANSFER APPARATUS AND VACUUM BONDING METHOD

摘要

Provided is a work transfer apparatus by which a board-like work is easily transferred to and from a work transfer means only by partially sliding and bending a flexible sheet. The work transfer apparatus is provided with a pressing means (4) which presses a part of a flexible sheet (2) arranged on a work holding table (5b, 8) toward board-like works (A, B), and a control means (6), which controls operation so that the flexible sheet (2) is pressed by the pressing means (4) to be partially slid and bent, and that a slid and bent portion (2b) reaches the board-like works (A, B) transferred by means of the work transfer means (3). Thus, at the time of carrying in the work, the partially slid and bent portion (2b) of the flexible sheet (2) abuts to at least the board-like work (B) carried in by the work transfer means (3), and the board-like works are permitted to be received. At the time of carrying out the work, bonded board-like works (A, B) are pushed and transferred to a work carry-out start position of the work transfer means (3) by means of the partially slid and bent portion (2b) and the board-like works are permitted to be carried out.