| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture a ZnO vapor deposition material which is excellent in composition uniformity by suppressing the segregation of rare earth oxides containing ≥2 and ≤17 kinds of elements selected from the rare earth group to be added to ZnO raw material powder, and to manufacture a ZnO vapor deposition material capable of obtaining a ZnO film uniform in deposition film composition. <P>SOLUTION: A surface of ZnO raw material powder 11 is covered by rare metal element oxide 13 containing ≥2 and ≤17 kinds of rare earth elements selected from the rare earth metal group by the barrel sputtering method to form a granular body. By using the granular material 14 or calcinated powder 19 obtained by calcinating the granular material, and then, disintegrating it, the first granulated powder 15 or the second granulated powder 21 is produced, and the ZnO vapor deposition material 17 or 23 consisting of ZnO sintered compact is produced through molding and sintering. <P>COPYRIGHT: (C)2010,JPO&INPIT |
