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经营范围
发明名称
High angular intensity schottky electron point source
摘要
申请公布号
EP1359599(B1)
申请公布日期
2010.08.25
申请号
EP20020080322
申请日期
2002.12.17
申请人
FEI COMPANY
发明人
SCHWIND, GREGORY A.;JUN, DAVID S.;MAGERA, GERALD G.
分类号
H01J9/04;H01J9/02;H01J1/14;H01J1/308;H01J37/073
主分类号
H01J9/04
代理机构
代理人
主权项
地址
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