| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micromirror device in which the generation of variation in distance between a micromirror chip and an electrode substrate and the deterioration of the optical characteristics of a movable mirror part are prevented. Ž<P>SOLUTION: The micromirror device 100 includes: the micromirror chip 110; the electrode substrate 130 disposed facing the micromirror chip 110; and a spacer 150 which is disposed between the micromirror chip 110 and the electrode substrate 130 and determines the gap between the micromirror chip 110 and the electrode substrate 130. Further, the micromirror chip 110 has four electrodes 122 provided on the face facing the electrode substrate 130, and the electrode substrate 130 has four electrodes 134 provided on the face facing the micromirror chip 110. The electrodes 122, 134 generate electrostatic suction force for keeping the relative positions of the micromirror chip 110 and the electrode substrate 130 constant and face each other. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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