| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical axis control method of a charged particle beam and a device for the same to make a necessary or unnecessary judgment for the charged particle beam axis control by using quantified judgment criteria acquired by quantifying artificial judgment criteria. SOLUTION: In the optical axis control method, and the device of the same include, optical element adjusting conditions to adjust the charged particle beams are changed, a plurality of images are obtained by using the different adjustment conditions, images with an acceptable image quality level or those with an unacceptable quality level are selected, a first image quality evaluation value is obtained based on the selected images, and the first image quality value obtained is compared with a second image quality value found from images obtained by scanning the charged particle beams, so that, when the second image quality evaluation value is not higher than the first image quality evaluation value or went below the first image quality evaluation value, the optical axis adjustment is to be conducted. COPYRIGHT: (C)2010,JPO&INPIT
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