发明名称 |
FILLED POLYMER COMPOSITION FOR ETCH CHAMBER COMPONENT |
摘要 |
A filled polymer composition having improved plasma resistance is disclosed. The composition includes a particle filler dispersed in a polymer matrix. The particle filler can be Nb2O5, YF3, AlN, SiC or Si3N4 and rare earth oxides. In an embodiment, the composition is utilized as a bonding adhesive for electrostatic chuck, bonding adhesive for shower head, bonding adhesive for liner, sealing material, O-ring, or plastic component. |
申请公布号 |
WO2010068635(A3) |
申请公布日期 |
2010.08.19 |
申请号 |
WO2009US67218 |
申请日期 |
2009.12.08 |
申请人 |
APPLIED MATERIALS, INC.;SUN, JENNIFER, Y.;DUAN, REN-GUAN;THACH, SENH;XU, LI |
发明人 |
SUN, JENNIFER, Y.;DUAN, REN-GUAN;THACH, SENH;XU, LI |
分类号 |
C08K3/22;B01J19/08;C08K3/34;C08L101/00;C09J11/04 |
主分类号 |
C08K3/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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