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发明名称
摘要
申请公布号
JP4524698(B2)
申请公布日期
2010.08.18
申请号
JP20070263138
申请日期
2007.10.09
申请人
发明人
分类号
H01L21/8242;H01L21/316;H01L27/108
主分类号
H01L21/8242
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