| 摘要 |
PURPOSE: An electrostatic chuck including a junction structure between different materials and a method for manufacturing the same are provided to increase the junction strength by eliminating voids while a dielectric plate and an insulating plate are combined. CONSTITUTION: The surface roughness of a junction surface on a dielectric plate is between 0.5 and 1.0um. An insulating plate(102) is combined with the dielectric plate. A material forming the insulating plate is different from a material forming the dielectric plate. An electrode(101) is installed between the dielectric plate and the insulating plate or is installed inside the dielectric plate. The dielectric plate is composed of ceramics. The insulating plate is composed of a polymeric film.
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