发明名称 |
PLASMA COATING SYSTEM AND METHOD FOR COATING OR TREATING THE SURFACE OF A SUBSTRATE |
摘要 |
The invention relates to a plasma coating system for coating or treating the surface of a substrate (3), comprising a working chamber (2) that can be evacuated and in which the substrate (3) can be placed, and comprising a plasma burner (4) for producing a plasma beam (5) by heating a process gas. The plasma burner (4) has a nozzle (41) through which the plasma beam (5) can exit the plasma burner (4) and can extend along a longitudinal axis (A) in the working chamber (2), wherein downstream of the nozzle (41) a mechanical delimiting device (12) is provided in the working chamber (2) and extends along the longitudinal axis (A) and protects the plasma beam (5) against a lateral, undesired penetration of particles. The invention further relates to a corresponding method. |
申请公布号 |
WO2010089175(A1) |
申请公布日期 |
2010.08.12 |
申请号 |
WO2010EP50459 |
申请日期 |
2010.01.15 |
申请人 |
SULZER METCO AG;GINDRAT, MALKO;GUITTIENNE, PHILIPPE;HOLLENSTEIN, CHRISTOPH |
发明人 |
GINDRAT, MALKO;GUITTIENNE, PHILIPPE;HOLLENSTEIN, CHRISTOPH |
分类号 |
H05H1/34;H01J37/32 |
主分类号 |
H05H1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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