发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a new semiconductor device using an oxide semiconductor. SOLUTION: The semiconductor device includes: a substrate (for example, a substrate having an insulating surface); a first electrode layer on the substrate; an oxide semiconductor layer partially existing on the first electrode; a gate insulating later covering a side surface of the oxide semiconductor layer; a second electrode layer electrically connected to the oxide semiconductor layer in an opening of the gate insulating layer; and a third electrode layer for applying a voltage to the side surface of the oxide semiconductor layer via the gate insulating layer. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010177450(A) 申请公布日期 2010.08.12
申请号 JP20090018446 申请日期 2009.01.29
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;KISHIDA HIDEYUKI
分类号 H01L29/786;H01L21/28;H01L29/417;H01L29/423;H01L29/49 主分类号 H01L29/786
代理机构 代理人
主权项
地址