| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of obtaining a large amount of displacement of an oscillating plate by achieving low voltage driving, and a liquid droplet delivering head and a liquid droplet delivering device including the electrostatic actuator. Ž<P>SOLUTION: The electrostatic actuator includes: the oscillating plate 4 functioning as a first electrode; an individual electrode 11 opposed to the oscillating plate 4 through a gap G and functioning as a second electrode where voltage is applied between the oscillating plate 4 and the individual electrode 11; an insulating film 4a formed on an opposed surface of the oscillating plate 4 to the individual electrode 11; and an insulating film 11a formed on an opposed surface of the individual electrode 11 to the oscillating plate 4, and the insulating film 4a and the insulating film 11a are formed of material of the same kind, and made to be an electret. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
