| 摘要 |
A semiconductor test system with self-inspection of an electrical channel is disclosed, which comprises a tester head, a plurality of parameter detection units and a self-inspection controller. The tester head includes a plurality of pin electronics cards inserted therein, in which the plurality of pin electronics cards contain a plurality of power channels, a plurality of I/O channels and a plurality of drive channels. The self-inspection controller outputs different inspection signals respectively to each power channel, each I/O channel and each drive channel. Then, the plurality of parameter detection units detect response signals respectively produced by each power channel, each I/O channel and each drive channel in response to the inspection signals respectively received thereby, and the response signals are judged by the self-inspection controller. Thus, the invention is capable of self-inspecting each electrical channel if it is in a normal condition, either in an open or short circuit, or if there exists a leakage condition.
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