| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a drying method capable of properly drying a solvent and the like remaining on a surface of a workpiece after steam drying. Ž<P>SOLUTION: This method of drying the cleaned workpiece 100 by using IPA (isopropyl alcohol) 120 includes a replacement process for replacing moisture attached to the workpiece 100 by cleaning, with IPA 120, a steam drying process for moving the workpiece 100 after the replacement process into a steam drying tank 5 and placing the workpiece in the steam of IPA 120, and an air blowing drying process for moving the workpiece 100 to the outside of the steam drying tank 5 after the steam drying process, and applying dry warm air to the workpiece 100. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
