METHOD FOR DETECTING CONCENTRATION OF ORGANIC SOLVENT GAS, METHOD FOR CONTROLLING CONCENTRATION OF ORGANIC SOLVENT GAS, DEVICE FOR DETECTING CONCENTRATION OF THE ORGANIC SOLVENT GAS AND METHOD FOR MANUFACTURING ORGANIC DEVICE

摘要

<P>PROBLEM TO BE SOLVED: To provide a method for continuously detecting the concentration of a low-concentration organic solvent in an inert gas, a method for controlling the concentration of an organic solvent in an inert gas low, a device for continuously detecting the concentration of an organic solvent in an inert gas, and a method for manufacturing an organic device by a wet method. Ž<P>SOLUTION: The method for detecting the concentration of an organic solvent gas in an inert gas detects the concentration of the organic solvent gas in the inert gas by a gas detection device and includes supplying the inert gas containing organic solvent gas, and an oxygen gas or oxidizing gas to the gas detection device, and detecting the concentration of the organic solvent gas. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž