PROCESS FOR PRODUCING SUBSTRATE OF AlN CRYSTAL, METHOD OF GROWING AlN CRYSTAL, AND SUBSTRATE OF AlN CRYSTAL,申请号EP20070745331-传众专利搜索

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发明名称	PROCESS FOR PRODUCING SUBSTRATE OF AlN CRYSTAL, METHOD OF GROWING AlN CRYSTAL, AND SUBSTRATE OF AlN CRYSTAL
摘要
申请公布号	EP2037012(A4)	申请公布日期	2010.08.11
申请号	EP20070745331	申请日期	2007.06.15
申请人	SUMITOMO ELECTRIC INDUSTRIES, LTD.	发明人	MIZUHARA, NAHO;KAWASE, TOMOHIRO;MIYANAGA, MICHIMASA
分类号	C30B29/38;H01L21/20;H01L21/203;H01L33/00;H01L33/30	主分类号	C30B29/38
代理机构		代理人
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