| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for producing a single crystal, capable of reducing the production cost by reducing the exchange frequency of a window plate of an inspection window by controlling the cloudiness of the window plate while reducing the throughput of an inert gas used. Ž<P>SOLUTION: The apparatus at least has the following: a main chamber 5 which stores crucibles 9, 10 for housing a raw material melt 6 and a heater 11 for heating the raw material melt 6; a pull chamber 7 which is continuously established on the upper part of the main chamber 5 and in which a grown single crystal 8 is pulled up and housed; a gas introduction hole 16 set up in the pull chamber 7; an inspection window 19 for observing a single crystal 8 installed in the top portion 22 of the main chamber 5; a window plate 23 for blocking the inspection window 19; and a commutation tube 3 having a window opening 20 extended downward from the ceiling part of the main chamber 5. The apparatus is equipped with a baffle plate 2 which is located in between the inspection window 19 and the window opening 20 of the commutation tube 3 so as not to interrupt the visibility from the inspection window 19 during the observation of the single crystal 8 and which prevents the cloudiness of the window plate 23 of the inspection window 19. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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