发明名称 SURFACE ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a surface acoustic wave device that has a stable frequency characteristic and can be easily manufactured. <P>SOLUTION: A surface acoustic wave device 100 includes a substrate 10 having a first surface 12, an inductor element 30 provided on the first surface 12 with a resin layer 20 in between, a surface acoustic wave element 50 electrically connected to the inductor element 30, and a package 60 for housing the substrate 10, the inductor element 30, and the surface acoustic wave element 50. The substrate 10 has a first interconnection 40 formed in the first surface 12. In planar view, the first interconnection 40 surrounds the periphery of the resin layer 20. The substrate 10 is stored in the package 60, with the first surface 12 opposite to the bottom face 66 of the package 60. The package 60 has a second interconnection 70 provided in a portion of the bottom face 66 opposite to the first interconnection 40. The first interconnection 40 and the second interconnection 70 are bonded together and form a space 82 wherein the resin layer 20 is airtightly encapsulated. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010171680(A) 申请公布日期 2010.08.05
申请号 JP20090011676 申请日期 2009.01.22
申请人 SEIKO EPSON CORP 发明人 SHINCHI SHUHEI
分类号 H03H9/25;H01L23/02;H01L23/10;H01L25/00;H03H3/08;H03H9/64 主分类号 H03H9/25
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