发明名称 METHOD FOR FORMING NANOWIRES AND ASSOCIATED METHOD FOR MANUFACTURING AN OPTICAL COMPONENT
摘要 The invention relates to a method for forming nanowires (nf) on the surface of a substrate (S) attached to a solid immersion lens, the method including a step of forming a catalyst element (P) on the surface of the substrate and a step of growing the nanowire (nf) using the catalyst element formed on the surface of the substrate (S), characterised in that the catalyst element is a metal nanoparticle (P) and in that the step of forming the catalyst element on the surface of the substrate comprises depositing the metal nanoparticle using a light beam focussed by the solid immersion lens on the surface of the substrate. The invention can be used in the field of microelectronics.
申请公布号 WO2010086378(A1) 申请公布日期 2010.08.05
申请号 WO2010EP51012 申请日期 2010.01.28
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;NEEL, DELPHINE;FERRET, PIERRE;GETIN, STEPHANE 发明人 NEEL, DELPHINE;FERRET, PIERRE;GETIN, STEPHANE
分类号 B82B3/00;C30B11/12;C30B29/60;H01L21/00 主分类号 B82B3/00
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