发明名称 |
METHOD FOR FORMING NANOWIRES AND ASSOCIATED METHOD FOR MANUFACTURING AN OPTICAL COMPONENT |
摘要 |
The invention relates to a method for forming nanowires (nf) on the surface of a substrate (S) attached to a solid immersion lens, the method including a step of forming a catalyst element (P) on the surface of the substrate and a step of growing the nanowire (nf) using the catalyst element formed on the surface of the substrate (S), characterised in that the catalyst element is a metal nanoparticle (P) and in that the step of forming the catalyst element on the surface of the substrate comprises depositing the metal nanoparticle using a light beam focussed by the solid immersion lens on the surface of the substrate. The invention can be used in the field of microelectronics. |
申请公布号 |
WO2010086378(A1) |
申请公布日期 |
2010.08.05 |
申请号 |
WO2010EP51012 |
申请日期 |
2010.01.28 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;NEEL, DELPHINE;FERRET, PIERRE;GETIN, STEPHANE |
发明人 |
NEEL, DELPHINE;FERRET, PIERRE;GETIN, STEPHANE |
分类号 |
B82B3/00;C30B11/12;C30B29/60;H01L21/00 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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