| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate holder which reduces distortion of a substrate caused by pinch. <P>SOLUTION: Pins 60a, 60b, and 60c and pin supporting bodies 61a, 61b, and 61c for pushing up a glass plate 10 by the elastic force of springs 9a, 9b, and 9c are provided in three places of a plate 5 provided in a concave portion of a holder body 1, respectively. Each pin support part of the pin supporting bodies 61a, 61b, and 61c is made to be cylindrical. O-rings 62a, 62b, and 62c are inserted between each cylindrical part of the pin supporting bodies 61a, 61b, and 61c and each lower side surface of each pins 60a, 60b, and 60c. Pins 60a, 60b, and 60c are made to be rotatable on the pin supporting bodies 61a and 61b and 61c, respectively. <P>COPYRIGHT: (C)2010,JPO&INPIT |
