| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve both problems of the deterioration of ionization efficiency (sensitivity) and condensation/adsorption. Ž<P>SOLUTION: This mass spectroscope has a chamber having an emitter to discharge metal ions, an molecule introduction part to introduce neutral molecules into the chamber, a gas introduction part to introduce other gases into the chamber, a control part which controls the temperature of a range for making the metal ions adhered to the neutral molecules, and a mass spectroscope which analyzes masses of the neutral molecules adhered to the metal ions. The control part adjusts so that the temperature is in the range as shown in the regions excluding the temperature 150°C or higher and 200°C or lower from the range among the area temperature [°C]=150×adhesion energy [eV], 100×adhesion energy [eV] -50, 20°C, and adhesion energy [eV]=the range surrounded between 2.1 and 0.5 provided that adhesion energy is made to be a horizontal axis when the metal ions are adhered to the neutral molecules and a region of the temperature [°C] in which the metal ions are adhered is made to be a vertical axis. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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