| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a deposited film forming device capable of uniformly and stably forming a functional deposited film of a large area, and to provide, particularly, a deposited film forming device capable of producing a high-quality electrophotographic photosensitive element excellent in charging properties inexpensively in high productivity. Ž<P>SOLUTION: In the deposited film forming device 100 where a raw material gas and discharge energy are applied to the inside of a reaction vessel 101 in which a high frequency electrode also serves as a side wall so as to form a deposited film on the surface of a substrate, an exhaust part 109 connected to the exhaust system is provided at a part of the side wall of the reaction vessel 101, and a screen member 111 having a potential same as that of a high frequency electrode is provided in such a manner that the exhaust part 109 is made into a blind spot from the substrate. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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