| 摘要 |
<p>There is provided a manufacturing system for manufacturing an electronic device through a plurality of manufacturing stages. The manufacturing system includes a plurality of manufacturing apparatuses performing processes corresponding to the plurality of manufacturing stages. The manufacturing system includes a manufacturing line that manufactures the electronic device, a manufacturing control section that causes the manufacturing line to manufacture a wafer having therein a test circuit including a plurality of transistors under measurement, a measuring section that measures an electrical characteristic of each of the plurality of transistors under measurement in the test circuit, an identifying section that identifies, among the plurality of manufacturing stages, a manufacturing stage in which a defect is generated, with reference to a distribution, on the wafer, of one or more transistors under measurement whose electrical characteristics do not meet a predetermined standard, and a setting changing section that changes a setting for a manufacturing apparatus that performs a process corresponding to the manufacturing stage in which the defect is generated.</p> |
