发明名称 Nozzle array configuration to facilitate deflux process improvement in chip attach process
摘要 Systems and methods for treating workpieces are described. One embodiment relates to a deflux system including at least one array of nozzles, the nozzles adapted to transmit a fluid outward therefrom. The nozzles are moveable relative to one another, so that a distance between adjacent nozzles can be varied. The nozzles are individually adjustable with respect to an angle of spray emitted therefrom during operation. The system also includes a controller adapted to send a signal to each of the nozzles to transmit the fluid therethrough at a desired angle at a desired time. Other embodiments are described and claimed.
申请公布号 US7767025(B2) 申请公布日期 2010.08.03
申请号 US20070865057 申请日期 2007.09.30
申请人 INTEL CORPORATION 发明人 RAMANAN HARIKRISHNAN;WANG YONGQIAN J.
分类号 B08B7/04;B08B1/02;B08B3/02 主分类号 B08B7/04
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