发明名称 |
Nozzle array configuration to facilitate deflux process improvement in chip attach process |
摘要 |
Systems and methods for treating workpieces are described. One embodiment relates to a deflux system including at least one array of nozzles, the nozzles adapted to transmit a fluid outward therefrom. The nozzles are moveable relative to one another, so that a distance between adjacent nozzles can be varied. The nozzles are individually adjustable with respect to an angle of spray emitted therefrom during operation. The system also includes a controller adapted to send a signal to each of the nozzles to transmit the fluid therethrough at a desired angle at a desired time. Other embodiments are described and claimed.
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申请公布号 |
US7767025(B2) |
申请公布日期 |
2010.08.03 |
申请号 |
US20070865057 |
申请日期 |
2007.09.30 |
申请人 |
INTEL CORPORATION |
发明人 |
RAMANAN HARIKRISHNAN;WANG YONGQIAN J. |
分类号 |
B08B7/04;B08B1/02;B08B3/02 |
主分类号 |
B08B7/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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