| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a surface emitting laser capable of accurately measuring and controlling PL peak wavelength of an active layer of the surface emitting laser. Ž<P>SOLUTION: The method of manufacturing the surface emitting laser includes: a first step of forming a first calibration structure containing, on a substrate 1, a multilayer film reflecting mirror 11 and a resonator 12 which is stacked on the mutilayer film reflecting mirror 11 and has resonator length of (2n+1)λ/4(n is natural number and λ is wavelength); a second step of acquiring an emission peak wavelength from photoluminescence measurement of an active layer 5 in the first calibration structure; a third step of adjusting formation condition of the active layer 5 so that the emission peak wavelength of the active layer 5 comes to be a predetermined wavelength; and a fourth step of forming a surface emitting laser having a resonator containing the active layer and a multilayer film reflecting mirror provided above and below the resonator, based on the formation condition of the active layer 5 available through the third step. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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