| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide waste gas treatment method excellent in durability for efficiently decomposing SF<SB>6</SB>. <P>SOLUTION: The treatment method is for decomposing SF<SB>6</SB>by bringing a fluorine-containing compound treatment agent, which is obtained by molding a mixture of Al(OH)<SB>3</SB>and Ca(OH)<SB>2</SB>with an average particle diameter (median diameter) of at least 55μm and at most 160μm in a mole ratio of (3:7) to (5:5), drying the molded mixture, and firing the dried mixture in a temperature range higher than 430°C and 890°C or lower in a nitrogen current or air current, and a waste gas containing SF<SB>6</SB>into contact with each other in a temperature range of 550 to 650°C, and when the SF<SB>6</SB>removal efficiency is lowered to 95% or lower during the operation, the fluorine-containing compound treatment agent is replaced. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
