发明名称 PRESSURE DETECTION UNIT AND PRESSURE SENSOR
摘要 A pressure detection unit includes: a first piezoelectric resonator element having a vibrating portion and a pair of base portions connected to both ends of the vibrating portion; a second piezoelectric resonator element having a resonating arm and a base portion integrated with one end of the resonating arm; a diaphragm having a pair of supporting portions to which the base portions of the first piezoelectric resonator element are bonded; and a base disposed to be opposed to the diaphragm. In the pressure detection unit, the base portion of the second piezoelectric resonator element is joined to one of the base portions of the first piezoelectric resonator element in an identical plane.
申请公布号 US2010186515(A1) 申请公布日期 2010.07.29
申请号 US20100690290 申请日期 2010.01.20
申请人 EPSON TOYOCOM CORPORATION 发明人 SAKURAI TOSHINOBU;SATO KENTA
分类号 G01L9/08;H01L41/04 主分类号 G01L9/08
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