<p>Provided is a charged beam device wherein the accuracy of an automatic focus/astigmatism correction is improved, and an accurate image of a sample surface pattern can be obtained.The charged beam device is comprised of an electron gun (1); a deflection control portion (8) which scans an object using an electron beam; a focus control portion (10) and an astigmatism correction portion (3) for the electron beam; an image processing portion (11); and a switching portion (9) which switches scan conditions when the pattern information of the surface of a sample (1001) is obtained and when the automatic focus/astigmatism correction is performed, so that the scan speeds or the scan procedures are switched when the pattern information is obtained and when the automatic focus/astigmatism correction is performed.</p>
