| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical waveguide, with which the optical waveguide has a very small waveguide loss because a crack is not made on the lower edge part of an optical waveguide core and the side face part of the optical waveguide core is not made rough when a core layer made of a polyamide system resin is etched by a reactive ion etching method, and because a crack is not made on a core layer during a patterning process of a mask layer formed on the core layer even when the core layer is made of a polyamide system resin calcined at a low temperature. SOLUTION: In manufacturing the optical waveguide in which a lower part clad layer, an optical waveguide core and an upper part clad layer, which are made of the polyamide system resin, respectively, are formed on a substrate, a dry mask composed of a non-organic material is used as a patterned mask layer and a halogen system gas is used as an etching gas, and the core layer made of the polyamide system resin is etched by the reactive ion etching method, thus the optical waveguide core is formed. COPYRIGHT: (C)2010,JPO&INPIT |
