| 摘要 |
PURPOSE: A capacitance type load cell, a manufacturing method thereof, and a load gauging method using the same are provided to effectively shield an external stimulus by forming an upper electrode between pillars of an upper substrate. CONSTITUTION: A capacitance type load cell comprises an upper substrate(30) which includes pillars(30A) in which the shape changes according to the delivered load, a lower substrate(31) which supports the upper substrate, and a capacitor(33) which comprises the upper electrode and the lower electrode. The upper electrode is formed on the upper substrate among the adjacent pillar. The lower electrode is formed on the lower substrate while being corresponded to the upper electrode.
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