摘要 |
An improved method of doping substrates, such as a solar cell, is disclosed. Conductors, such as metal lines, are often deposited on the surface of a substrate. In some embodiments, the conductivity of the substrate beneath the conductors is different than the conductivity of other regions of the substrate. Therefore, the conductors can serve as the mask for a subsequent blanket doping, which changes the conductivity of the surface of the substrate, except beneath the conductors. In some embodiments, an initial blanket doping is performed prior to the deposition of the conductors to create an initial uniformly doped region.
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