发明名称 THERMIONIC EMISSION CURRENT MEASUREMENT DEVICE AND THERMIONIC EMISSION CURRENT MEASURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a thermionic emission current measurement device necessary for accurately grasping work function only for a cathode. <P>SOLUTION: The thermionic emission current measurement device 100 includes a measurement device body 1, a direct current power source 2, a pulse power source 3, and a current-voltage measurement device 6. The measurement device body 1 includes a vacuum chamber 13, a sample mounting stage 17 fitted inside the vacuum chamber 13 and mounting the cathode 15 as a measuring sample, an anode 19 fitted inside the vacuum chamber 13 and a filament 21. When the thermionic emission current of the cathode 15 is measured, a current is made to flow into the filament 21 to heat and emit thermoelectrons, a voltage is impressed on the filament 21 with the direct-current power source 2 to accelerate electrons, electron impact is given to the cathode 15 to heat it, and the thermionic emission current of the heated cathode 15 is measured with the use of the current-voltage measurement device 6. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010161061(A) 申请公布日期 2010.07.22
申请号 JP20090263771 申请日期 2009.11.19
申请人 ALLIED MATERIAL CORP 发明人 KATO MASAHIRO;NAKABAYASHI SEIJI
分类号 H01J9/42;H01J1/15 主分类号 H01J9/42
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