| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for nitriding a workpiece, by which a nitride film (insulating layer) of good characteristics can be formed in a state to highly hold the controllability of a film thickness. SOLUTION: In the nitriding method for nitriding the surface of the workpiece W that is made at a prescribed temperature in a treating vessel 2, the nitriding is performed by using H2 and NH3 under a reduced pressure atmosphere to form nitride films 76, 82. As a result, the nitride film (insulating layer) of good characteristics is formed in a state to highly hold the controllability of the film thickness. |
