Evaporating an evaporation material in the form of organic material, comprises heating the evaporation material in a process chamber of an evaporating device, evaporating over an evaporating surface and then depositing on a substrate

摘要

The process comprises heating an evaporation material (3) in a process chamber (12) of an evaporating device (1), evaporating the material in the form of organic material over an evaporating surface, and then depositing the organic material on a substrate (9), where the evaporation material is heated in an evaporation zone surrounding the evaporating surface and the evaporation zone is smaller than the evaporation material. The evaporation zone is subsequently guided relative to a location change of the evaporating surface due to the evaporation of the evaporation material. The process comprises heating an evaporation material (3) in a process chamber (12) of an evaporating device (1), evaporating the material in the form of organic material over an evaporating surface, and then depositing the organic material on a substrate (9), where the evaporation material is heated in an evaporation zone surrounding the evaporating surface and the evaporation zone is smaller than the evaporation material. The evaporation zone is subsequently guided relative to a location change of the evaporating surface due to the evaporation of the evaporation material. The heating of the evaporation material takes place by heating elements (4) only in the area of the evaporating surface, where the heating elements are regulated independent of the each other. For evaporation, the heating element is sequentially switched to the location change of the evaporating surface of the evaporation material. The evaporation material is evaporated with the heating elements along a vertical axis of the evaporating device lying in gravitation direction. For heating the evaporation material, the heating zones are heated in the gravitation direction starting from an upper end of the evaporation material and are formed by the heating elements. The evaporation material is subsequently evaporated from the upper end of the evaporation material in the gravitation direction according to the requirement. The evaporation material is cooled outside of the evaporation zone. The control of the heat introduction of the heating element for evaporating the organic material takes place on the evaporating surface by a shield of a crucible that is arranged between the heating elements and the crucible and is opposite to the heating elements, where the shield is displaced to the location change under releasing the evaporation zone and the evaporating surface of the evaporation material is accessibly made to the heat introduction by the heating element. The shield is cooled by a cooling device, where the organic material covered by the shield is cooled. An independent claim is included for a device for evaporating an evaporation material in the form of organic material.