| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection apparatus method capable of simultaneously acquiring property values, such as, the thickness and physical properties of an object, without contact or their distributions and an inspection. <P>SOLUTION: An object inspection apparatus includes an irradiation means 9 for irradiating an object 2 with electromagnetic waves; a detection means 10 for detecting electromagnetic waves from the object; an acquisition means 26; a storage means 21; and an arithmetic means 20. The acquisition means acquires both the propagation delay time of the electromagnetic waves on the detection time of the electromagnetic waves by the detection means and the amplitude of detected electromagnetic waves. The storage means previously stores relation data among propagation delay time, the amplitude of electromagnetic waves, and typical values of the properties of objects to electromagnetic waves. The arithmetic means uses the propagation delay time acquired, amplitude of electromagnetic waves acquired, and relational data for determining the absolute values of the thickness and properties of the object 2 acquired. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
