| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an array testing device, a method of measuring substrate one location position of the array testing device, and a method of measuring specific position coordinate imaged by a camera assembly. Ž<P>SOLUTION: The array testing device includes a test part supporting a substrate to be tested. At least one modulator head is disposed adjacent to and on the test part and detects a failure position of the substrate positioned at least at the test part. The modulator head includes a fixed block. The camera assembly is coupled to the fixed block so that a reference camera and an adjacent camera are arranged fixed. A coordinate measurement modulator block includes a position-indicating member separably coupled to the fixed block, positioned between the camera assembly and the substrate, and arranged in conformity with a focal length of the camera constituting the camera assembly. In the position-indicating member, a reference position mark imaged by the reference camera and at least one corresponding position mark imaged by the adjacent camera are formed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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