CHEMICAL SUPPLY DEVICE AND SUPPLY METHOD THEREOF,申请号KR20080032161-传众专利搜索

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发明名称	CHEMICAL SUPPLY DEVICE AND SUPPLY METHOD THEREOF
摘要
申请公布号	KR100969606(B1)	申请公布日期	2010.07.12
申请号	KR20080032161	申请日期	2008.04.07
申请人		发明人
分类号	H01L21/02;H01L21/00	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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