| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece stage which includes a pedestal with a concave portion for supplying vacuum and a suction plate having a plurality of through-holes to be attached to the concave portion for sucking a workpiece, and includes a sealing elastic body on the periphery of the sucking plate in order to suck and hold the warped workpiece and inexpensive and facilitates processing, and to provide an exposure apparatus using the workpiece stage. <P>SOLUTION: The sealing elastic body is fixed to a sealing elastic body attaching plate which is different from the sucking plate and is detached from the pedestal, and the sealing elastic body attaching plate is attached to the pedestal so as to surround the sucking plate. <P>COPYRIGHT: (C)2010,JPO&INPIT |
