| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for producing a single crystal, capable of controlling individual chambers so as to prevent application of abnormal water pressure thereto, feeding cooling water at an appropriate flow volume and shortening time required for anomaly detection. Ž<P>SOLUTION: In the apparatus for producing a single crystal, each chamber has a cooling water passage, and each cooling water passage has a pressure-regulating valve, a flow rate-regulating valve, a flow meter, a pressure-relief valve and a digital flow meter. The pressure-regulating valve and the flow rate-regulating valve of each cooling water passage are set to the flow rate and pressure of cooling water to be fed to each of the partitioned chambers, the flow rate of the cooling water discharged from each of the partitioned chambers is regularly measured by the digital flow meter and recorded, an alarm is set off when the recorded flow rate becomes smaller than a prescribed value, the feeding pressure of the cooling water fed to each cooling water passage is measured, and the feeding pressure of the cooling water is relieved by the pressure-relief valve of the relevant cooling water passage when the measured feeding pressure exceeds a prescribed value. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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