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发明名称
VERFAHREN ZUR POROSITÄTSMESSUNG MITTELS ELLIPSOMETRIE UND VORRICHTUNG ZUR IMPLEMENTIERUNG EINES SOLCHEN VERFAHRENS
摘要
申请公布号
DE602006014533(D1)
申请公布日期
2010.07.08
申请号
DE200660014533T
申请日期
2006.04.28
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
SIMON, GURVAN;FERRIEU, FREDERIC
分类号
G01N15/08;G01N21/21
主分类号
G01N15/08
代理机构
代理人
主权项
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