发明名称 IMPROVED ABATEMENT OF EFFLUENT GAS
摘要 Systems and methods are provided involving abatement of effluents. Aspects of the invention may include starting an abatement system at a high level setting; receiving an effluent having an undesirable material at the abatement system; abating the undesirable material using the abatement system at the high level setting; receiving information about the effluent; analyzing the information to determine an optimal setting; adjusting the high level setting to the optimal setting; and receiving more of the effluent having more of the undesirable material, which then may be attenuated. The optimal setting corresponds to a selected setting efficiency. Numerous other aspects are provided.
申请公布号 WO2010078216(A2) 申请公布日期 2010.07.08
申请号 WO2009US69517 申请日期 2009.12.23
申请人 APPLIED MATERIALS, INC.;TSAI, KENNETH, CHIEN-QUEN;PORSHNEV, PETER, I.;CURRY, MARK, W.;RAOUX, SEBASTIEN 发明人 TSAI, KENNETH, CHIEN-QUEN;PORSHNEV, PETER, I.;CURRY, MARK, W.;RAOUX, SEBASTIEN
分类号 B01D53/74;G05B1/00 主分类号 B01D53/74
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