发明名称 APPARATUS FOR PULLING SILICON SINGLE CRYSTAL
摘要 An apparatus for pulling a silicon single crystal, comprising: a crucible that stores a silicon melt; a heater that heats the crucible; a crucible driving unit for rotating and/or lifting up and down the crucible; a chamber that holds the crucible and the heater; and a magnetic field applying unit that is provided outside the chamber and applies a magnetic field to the chamber, wherein the magnetic field applying unit is formed along the outer peripheral surface of the chamber such that substantially concentric circle-shaped equi-strength lines of the magnetic field are formed about a center axis of the crucible.
申请公布号 US2010170432(A1) 申请公布日期 2010.07.08
申请号 US20070090031 申请日期 2007.05.30
申请人 SUMCO CORPORATION 发明人 FURUKAWA JUN
分类号 C30B15/30;C30B15/10;C30B15/14 主分类号 C30B15/30
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