METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL

摘要

PURPOSE: A method for manufacturing a silicon mono-crystalline is provided to eliminate bubbles in a crucible by simultaneously changing a pressure and a temperature in a chamber in a bubble elimination process. CONSTITUTION: A supporting shaft(12) is formed to a gravity direction by passing the lower center of a chamber(11). A graphite susceptor(13) is fixed on the upper end of the supporting shaft. A silica glass crucible(14) is housed in the graphite susceptor. A supporting shaft driving unit(16) elevates and rotates the supporting shaft. A seed chuck(17) supports a seed crystal. A wire(18) hangs the seed chuck.