发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR TRANSISTOR
摘要 PURPOSE: A method for manufacturing a semiconductor transistor is provided to increase the integration of a circuit by forming an NP diode for the gate electrode through NP doping. CONSTITUTION: An element isolation film(104) divides a semiconductor substrate into an active area and an element isolation region. A poly-silicon for a gate electrode is evaporated over the semiconductor substrate. An NP doped region is formed within the poly-silicon for the gate electrode through an ion implant process. The poly-silicon for the gate electrode is planarized. An NP diode(106") for the gate electrode is formed by patterning the poly-silicon for the gate electrode.
申请公布号 KR20100078046(A) 申请公布日期 2010.07.08
申请号 KR20080136187 申请日期 2008.12.30
申请人 DONGBU HITEK CO., LTD. 发明人 LEE, JEONG GWAN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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