SUBSTRATE PROCESSING APPARATUS, DISPLAYING METHOD THEREOF, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To simultaneously display the mounting states of substrates held in a substrate holding tool and the detailed informations of the mounting states, on a same screen. SOLUTION: The substrate processing apparatus carries a substrate holding tool having a plurality of mounted substrates, into a furnace and perform predetermined processing. The mounting states of the respective substrates, the crack-detecting-result informations of the respective substrates, and the recovering states of the substrates which are determined as abnormal ones by crack-detecting-result informations are displayed on an operating screen. COPYRIGHT: (C)2010,JPO&INPIT