| 摘要 |
PROBLEM TO BE SOLVED: To obtain a polyester film for dry film resists satisfying transparency, especially light transmittance near 365 nm wavelength, slipperiness, winding properties, resolution and recyclability. SOLUTION: This polyester film for the dry resists is characterized in that the polyester film is a biaxially oriented polyester film having >=10 and <=25 μm thickness and has <=3% value of haze of the film and <150 ppm of a polycondensation metal catalyst residue and the contents of antimony metal are <=15 mmol% based on the whole acid component. |
