| 摘要 |
PURPOSE: A vacuum pressure control system and a vacuum pressure control program are provided to control the vacuum pressure within the reaction chamber to the targeted pressure by using a vacuum proportional opening valve which is arranged on a pipe connecting a reaction chamber and a vacuum pump. CONSTITUTION: A valve body(45) comprises a valve hook(47) and a cylinder(41). The cylinder offers the driving force to the valve body. A vacuum proportional opening valve(16) is positioned between the reaction chamber and the vacuum pump. A control unit adjusts the opening of the vacuum proportional opening valve. The vacuum pressure within the reaction chamber is controlled to the target value by the feedback control.
|
