发明名称 Dual metal interconnection
摘要 Embodiments relate to a dual metal interconnection structure of a semiconductor device and a method for manufacturing the same. In embodiments, the dual metal interconnection structure may include a contact plug selectively formed in an interlayer dielectric, which covers a silicon substrate, and contacted with an active area of the silicon substrate, a first aluminum interconnection formed on one contact plug in every two cells and having a width larger than a width of the contact plug, a dielectric wrapping an upper surface and a side plane of the first aluminum interconnection, and a second aluminum interconnection formed on one contact plug in every two cells alternatively with the first aluminum interconnection, insulated from the first aluminum interconnection by the dielectric, and having a width larger than a width of the contact plug. The dual metal interconnection structure may be formed by performing an interconnection process two times, and a width of the interconnection and a gap between interconnections may be increased.
申请公布号 US7750472(B2) 申请公布日期 2010.07.06
申请号 US20060617366 申请日期 2006.12.28
申请人 DONGBU HITEK CO., LTD. 发明人 KIM HEONG JIN;KIM SUNG JIN
分类号 H01L21/00 主分类号 H01L21/00
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