| 发明名称 |
ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING AN ELECTROSTATIC CLAMP |
| 摘要 |
<p>The invention relates to an electrostatic clamp for use in a lithographic apparatus comprising a layer of material provided with burls, wherein an electrode surrounded by an insulator and or a dielectric material is provided in between the burls and a method of manufacturing such an electrostatic clamp. The electrostatic clamp may be used to clamp an object to an object Support in a lithographic apparatus.</p> |
| 申请公布号 |
KR20100075517(A) |
申请公布日期 |
2010.07.02 |
| 申请号 |
KR20107008658 |
申请日期 |
2008.09.19 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
SIJBEN ANKO JOZEF CORNELUS;VAN EMPEL TJARKO ADRIAAN RUDOLF;VISSER RAIMOND;FRANSSEN JOHANNES HENDRIKUS GERTRUDIS;YANG ZONGQUAN;BRALS ALBERT;RIJPMA ALBERT PIETER |
| 分类号 |
H01L21/687;H01L21/027;H01L21/683;H02N13/00 |
主分类号 |
H01L21/687 |
| 代理机构 |
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