| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for pulling a silicon single crystal capable of preventing a powdery sublimable dopant from falling to a melt from a supplying part for supplying the evaporated sublimable dopant to the melt. SOLUTION: The apparatus for pulling the silicon single crystal 1 is equipped with a pulling furnace 2, a sample container 6 to house a sublimable dopant 23 which is installed at the inside or the outside of the pulling furnace 2, a hollow supplying part 7 provided in the inside of the pulling furnace 2 for supplying the sublimable dopant 23 supplied from the sample container 6 to a melt 5, and a connecting means which connects the sample container 6 and the supplying part 7 and has a first passage 10 for communicating the supplying part 7 with the sample container 6. The supplying part 7 has a receiving part 75 in its inside for receiving powder of the sublimable dopant 23 which passed the first passage 10 which is installed at the downside of one end of the supplying part 7 side in the first passage 10, a second passage 20 extending upward from the receiving part 75 in which the evaporated sublimable dopant 23 can circulate and a third passage 30 extending downward from the second passage 20. COPYRIGHT: (C)2010,JPO&INPIT
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