摘要 |
<p>A laser ablation-in-liquid system, which irradiates laser light to a dispersion liquid in which solid materials are dispersed so that the solid materials are subdivided in the liquid, is provided with a light source that oscillates the laser light, a device in which a flow passage through which the dispersion liquid circulates is arranged, a beam splitter that carries out n-division of the laser light oscillated from the light source, where n is an integer that is equal to or more than 2, and a prism that irradiates the laser light divided by the beam splitter to the dispersion liquid circulating through the flow passage.</p> |
申请人 |
EBARA CORPORATION;KATO, HIROYUKI;MATSUMURA, WATARU;ISHIGURO, AKIO;IRIUCHIJIMA, YOSHIHARU;UMEDA, ISAO;HIRATA, KAZUYA |
发明人 |
KATO, HIROYUKI;MATSUMURA, WATARU;ISHIGURO, AKIO;IRIUCHIJIMA, YOSHIHARU;UMEDA, ISAO;HIRATA, KAZUYA |